Detection of VOCs in a Semiconductor fabrication plant

HAPSITE Smart Portable GC/MS: detection of VOCs in a semiconductor fabrication plant.

Several of the volatile chemicals (VOCs) used in the manufactoring processes of semiconductor fabrication plants may be hazardous to the health and safety of workers. Timel monitoring for the presence and quantity of these chemicals in the plant environement provides the best protection for workers. A method for detecting the chemicals listed in the Table 1 was developed on the HAPSITE portable gas chromatograph/mass spectrometer.

Read the Application Note to find out more!